Formation and behavior of negative ions in low pressure aniline-containing RF plasmas

Formation and behavior of negative ions in low pressure aniline-containing RF plasmas

Schematic diagram of experimental setup in this study and images of

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Discharge voltage as a function of working gas pressure.

PDF) Nanoparticle formation in a low pressure argon/aniline RF plasma

PDF] Fluorine negative ion density measurement in a dual frequency

Flux of the main positive ions (a) and negative ions (b) entering